With +/- 1% metering accuracy, the Malema Ultrasonic Flow Controllers provide superior performance in all operating conditions regardless of density, viscosity, gases or temperature. Malema Ultrasonic Flow Controllers are designed for use in wet clean tools and post-CMP cleaning applications.
The LFC-7000 Series Ultrasonic Flow Controllers come with an integral display, are equipped with either a motor-actuated pinch valve (for slurries) or diaphragm valve (for chemistries), and provide a range of flow control from 5 to 12,000 ml/min.
The LFC-7650 Series Ultrasonic Flow Controllers are equipped with an integrated pressure transducer with a diaphragm valve and offer a wide range of flow control from 50 to 4,000 ml/min.