The patented Malema Interconnect Interlock Device (MIID-1000) By-Pass Leak Detection and Prevention System features all high purity PTFE and PFA construction of the wetted components and was developed especially for use in CMP tools. With built-in leak detection, monitoring, and optical valve position sensing, the MIID Interlock Device provides backflow protection and prevents internal bypass leaks in bulk chemical and high-purity water applications.
This product is protected by U.S. and International patents. See
our list of patents for more information.