LFC-7650 ULTRASONIC FLOW CONTROLLERS Drop-In Ultrasonic Flow Controller with Integrated Pressure Transducer

The Malema LFC-7650 Series Ultrasonic Flow Controller with integrated pressure transducer and state-of-the-art control algorithm provides ± 1% metering accuracy with superior performance and repeatable control in all operating conditions. Offering a wide range of flow control from 50 - 4,000 mL/min, these LFC-7650 closed-loop flow control modules are ideal for wet clean tools and post-CMP cleaning applications.

This ultrasonic technology is a drop-in upgrade for competing differential pressure flow controllers. The LFC-7650 fits seamlessly into your tools while providing consistent accurate flow, preventing costly and wasteful sensor drift.

Unlike other ultrasonic flow meters, the Digital Signal Processing (DSP) technology in the LFC-7650 ensures reliable performance even with a certain degree of bubbles present in process fluids. The LFC-7650 also eliminates the issue of measurement drifts caused by environmental and temperature changes.

Setting the standard for flow measurement in terms of +/- 1% metering accuracy, a 20:1 turndown ratio and repeatability, the LFC-7650 Series Ultrasonic Flow Controller fits seamlessly into tools and improves product quality, minimizing costly downtime and increasing productivity.

Features

  • High Accuracy - Controls flow rate to within ± 1% of the set point for the entire flow range
  • Wide range of flow control capability - 50 ml/min - 4000 ml/min
  • Drop-In upgrade replacement for current differential pressure flow meter
  • Eliminates sensor drift that can occur with changes to environmental or temperature conditions due to superior ultrasonic technology
  • With in-built pressure sensor analog output, providing the same required feature as the competing differential pressure flow controller
  • Fast Response 3 seconds (typically < 2 seconds for most applications)
  • High flow turndown ratio (20:1)
  • All Polytetrafluoroethylene (PTFE) / Perfluoroalkoxy (PFA) wetted part construction – ensures compatibility with UHP liquid chemicals and DI water
  • Low maintenance – LFC-7650 Ultrasonic Flow Controllers contain NO moving parts, diminishing any wear component issues, leading to improved uptime
  • Components of the LFC-7650 can be repaired, allowing you to recoup your initial investment

Applications

  • Semiconductor CMP tools
  • Wet cleaning tools 
  • Copper plating tools

Specifications

Performance Specifications

Standard Full Scale Range Flow Controllabity Range Port Size Pressure Accuracy
1 5 - 50 ml/min 1/4" ±1% of Full Scale
2 10 - 100 ml/min 1/4" ±1% of Full Scale
3 25 - 250 ml/min 1/4" ±1% of Full Scale
4 50 - 500 ml/min 1/4" ±1% of Full Scale
5 100 - 1,000 ml/min 1/4" or 3/8" ±1% of Full Scale
6 125 - 1,250 ml/min 1/4" or 3/8" ±1% of Full Scale
7 250 - 2,500 ml/min 1/4" or 3/8" ±1% of Full Scale
8 400 - 4,000 ml/min 3/8" ±1% of Full Scale
Pressure Measurement (Optional) 0 - 60 psi***
Pressure Accuracy ±1% of Full Scale
Accuracy of Flow Control* 1/4" ±1% of set point or ±3 ml/min (whichever is larger)
3/8" ±1% of set point or ±6 ml/min (whichever is larger)
Repeatability* 1/4" ±0.5% of set point or ±1.5 ml/min (whichever is larger)
3/8" ±0.5% of set point or ±3 ml/min (whichever is larger)
Flow Control Time < 3 sec
Fluid Temperature Max 60°C **
Maximum Expected Operating Pressure 0.4 MPa (60 psig)
Maximum Safe Internal Pressure 0.5 MPa (70 psig)
Ambient Temp/Humidity 0 - 40 °C (30-80% R.H., without DEW)
Minimum Differential Pressure 10 psid

* Please consult with the factory for tighter accuracy/repeatability needs.
** Contact the factory for higher fluid temperature requirements.
*** Contact the factory for other pressure ranges.

Electrical Specifications

Electrical Input 24 V DC ± 10%
Consumption Max 0.5 A
Set Point Signal In* 0 - 5 V DC or 0 - 10 V DC or 4 - 20 mA (input resistance 250 Ω)
Flow Signal Out** 4 - 20 mA Passive
Pressure Signal Out 4 - 20 mA Passive

Material Specifications

Wetted parts for Modules PFA, PTFE, Kalrez or equivalent
Non wetted parts, enlcosure ABS, PEEK, PVC*
Connectors PPS

* Flame retardant (FMET4325)

Physical Specifications

Mounting Orientation Horizontal
Fluid Connections Inlet/Outlet: 1/4" or 3/8", Male Flare or Male Super Pillar 300
Flow Restrictions (orifice) < 2 mm
Ingress Rating IP64

For additional specification details, please refer to the product data sheet located in the documentation tab of this web page.

Downloads

Data Sheets

LFC-7650 Data Sheet