CMFC-6000 Series Coriolis Mass Flow Controller Integrated Coriolis Mass Flow Controller with High Accuracy and PTFE/PFA Wetted Parts

Delivering the highest available measurement and control accuracy of ± 1%, the CMFC-6000 Integrated Coriolis Flow Controller Series by Malema offers a line of highly accurate closed-loop flow controllers designed for use in the semiconductor industry. With an integrated pressure transducer and patented Coriolis Controller technology, the CMFC-6000 provides superior performance in all operating conditions. This Malema Coriolis Flow Controller is used in a wide variety of high-purity applications, including DI water, harsh chemicals, and CMP polishing slurries.

Designed with either 1/4” or 3/8” port sizes, the CMFC-6000 has six models with flow rate ranges starting at 50 grams per minute up to 2,500 grams per minute, within 1% accuracy of the set point. It provides fast, consistent control with a response time of less than two seconds.

This Coriolis technology is a drop-in upgrade for competing differential pressure flow controllers. The CMFC-6000 fits seamlessly into your tools while providing consistent, accurate flow, preventing costly and wasteful sensor drift.

With its advanced digital signal processing, Malema Coriolis Flow Controller Technology accurately measures flow regardless of changes in density, viscosity and temperature, all of which can cause measurement drift in competing differential pressure flow controllers. In addition, the Malema CMFC-6000 is highly tolerant of fluids containing entrapped gases (bubbles) and accurately measures the flow with up to 30% bubble presence. Malema Coriolis Flow Controllers minimize costly downtime, improve yield throughput, and increase the semiconductor industry's operational profitability.

Features

  • Drop-In upgrade replacement for current differential pressure flow meter
  • Patented Coriolis technology, offering the only plastic Coriolis flow controller in the market
  • High accuracy - controls flow rate to within ± 1% of setpoint; ideal for fluid blending and/or dispense applications and reduces chemical consumption
  • Fast response of two seconds (typically less than one second for most applications) to set point changes, ensuring steady and consistent chemical delivery
  • PTFE/PFA wetted part construction – ensures compatibility with UHP liquid chemicals and DI water
  • Eliminates sensor drift that can occur with changes to environmental or temperature conditions due to superior Coriolis technology
  • Mass flow measurement accuracy is independent of fluid density and viscosity, eliminating the need to re-calibrate on different fluids
  • Available from sizes ¼”-⅜”; flow range: 50 – 2,500 gram/ min
  • Operates and measures two-phase flow conditions with gas volumetric void functions in excess of 30%
  • Accuracy is unaffected by flow regimen (e.g., laminar or turbulent flow) or variations in flow velocity profile
  • Integrated closed-loop controller for chemical and slurry applications
  • Built-in temperature sensor allows the Coriolis flow controllers to do dynamic temperature compensation
  • With in-built pressure sensor analog output, providing the same required feature as the competing differential pressure flow controller

Specifications

Performance Specifications

Flow Range 50 - 250 g/min
50 - 500 g/min
100 - 1000 g/min
150 - 1500 g/min
200 - 2000 g/min
250 - 2500 g/min
400 - 4000 g/min (3/8" connections only)
500 - 5000 g/min (3/8" connections only)
Accuracy* (for room temperature DIW) ±1% of set point or ±3 g/min (whichever is larger)
Control Repeatability ±1% of set point or ±1.5 g/min (whichever is larger)
Flow Control Time < 2 sec
Fluid Temperature 18 - 50° C*
Ambient: Temperature/Humidity 0° - 40° C / 30 - 80% RH, without Dew
Maximum Expected Operating Pressure 50 psig
Maximum Safe Internal Pressure 70 psig

* Consult the factory for higher temperature applications

Electrical Specifications

Power Supply Input 24 VDC ± 10%
Power Consumption 6W ~ 0.25 A (Power on: inrush current 0.7A)
Control Signal In* 0 - 5 V DC, 0 - 10 V DC, or 4 - 20 mA
Pressure Signal Out* 0 - 5 V DC, 0 - 10 V DC, or 4 - 20 mA active
Temperature Signal Out* 0 - 5 V DC, 0 - 10 V DC, or 4 - 20 mA active

* Other options available

Material Specifications

Wetted Parts High Purity PFA, PTFE
Enclosure Parts PEEK, Acrylic, Vinyl, PVC*, PVDF

* Flame retardant (FMET4325)

Physical Specifications

Mounting Orientation Horizontal or Vertical
Fluid Connections Inlet/Outlet: 1/4" or 3/8", Flare or Pillar
Ingress Rating IP65

Downloads

Product Sheets

CMFC-6000 Data Sheet