CMFC-5000 Series Coriolis Mass Flow Controller Integrated Coriolis Mass Flow Controller with High Accuracy and PTFE/PFA Wetted Parts

Delivering the highest available measurement and control accuracy of ±1.5%, the CMFC-5000 Integrated Coriolis Flow Controller Series by Malema offers a line of highly accurate closed-loop flow controllers designed for use in the semiconductor market. This patented Coriolis Controller technology features PTFE/PFA wetted parts. It is used in a wide variety of high-purity applications, including DI water, harsh chemicals, and CMP polishing slurries, including diamonds.

Designed with either 1/4” or 3/8” port sizes, the CMFC-5000 has many models with flow rate ranges starting at 50 grams per minute up to 4,000 grams per minute to within 1.5% accuracy of the set point and providing fast, consistent control with a response time of less than two seconds, providing superior accuracy - regardless of density, viscosity, gases, or temperature.

With its advanced digital signal processing, Malema Coriolis Flow Controller Technology accurately measures flow regardless of changes in density, viscosity and temperature, ensuring reliability and repeatability. In addition, the Malema CMFC-5000 is highly tolerant of fluids containing entrapped gases (bubbles) and accurately measures the flow with up to 30% bubble presence. Malema Coriolis Flow Controllers minimize costly downtime, improve yield throughput, and increase the semiconductor industry's operational profitability.

Features

  • Patented Coriolis technology, offering the only plastic Coriolis flow controller in the market
  • High accuracy - controls flow rate to within ± 1.5% of setpoint; ideal for fluid blending and/or dispense applications and reduces chemical consumption
  • Fast response of two seconds (typically less than one second for most applications) to set point changes, ensuring steady and consistent chemical delivery
  • PTFE/PFA wetted part construction – compatible with UHP liquid chemicals, DI water and CMP slurries (slurry module with Pt-cured silicone tubing)
  • Operates and measures two-phase flow conditions with gas volumetric void functions in excess of 30%
  • Available in 1/4" and 3/8" sizes, with a flow range between 25 to 4,000 grams per minute
  • Mass flow measurement accuracy is independent of fluid density and viscosity, eliminating the need to re-calibrate on different fluids
  • Accuracy is unaffected by flow regime (e.g., laminar or turbulent flow) or variations in the flow velocity profile
  • Integrated closed-loop controller for chemical and slurry applications
  • Broad application range with two types of control valves – pinch or diaphragm
  • Built-in temperature sensor allows the Coriolis flow controllers to do dynamic temperature compensation
  • Optional built-in pressure sensor provides multi-variable outputs such as flow, temperature and pressure in one unit

Applications

  • Semiconductor CMP tools – suitable for use to precisely control the flow of chemi- cals and polishing slurries dispensed to the polishing platen; an ideal replacement for peristaltic pump based delivery systems.
  • Cleaning tools – for accurate and reliable control in the blending and delivering of cleaning chemistries on post CMP cleaning and related tools.
  • Copper plating tools – well suited to chemical mixing and dispense applications

Specifications

Performance Specifications

Flow Range 50 - 500 g/min
100 - 1000 g/min
150 - 1500 g/min
200 - 2000 g/min (3/8" connections only)
250 - 2500 g/min (3/8" connections only)
300 - 3000 g/min (3/8" connections only)
400 - 4000 g/min (3/8" connections only)
Accuracy* (for room temperature DIW) ±1% of set point or ±3 g/min (whichever is larger)
Control Repeatability ±0.5% of set point or ±1.5 g/min (whichever is larger)
Flow Control Time < 2 sec (< 1 sec for most applications)
Fluid Temperature 18 - 50° C**
Ambient: Temperature/Humidity 0° - 40° C / 30 - 80% RH, without Dew
Maximum Expected Operating Pressure 50 psig
Maximum Safe Internal Pressure 70 psig

* Please consult with Malema for tighter accuracy needs
** Consult the factory for higher temperature applications

Electrical Specifications

Power Supply Input 24 Vdc ± 10%
Power Consumption 6W ~ 250 mA @ 24 V DC
Control Signal In* 0 to 10 V DC or 4 to 20 mA
Flow Signal Out** 0 to 10 V DC or 4 to 20 mA

* Consult factory for other options

Material Specifications

Wetted Parts PFA high purity, PTFE, PT cured Silicone*
Enclosure Parts PEEK, Acrylic, Vinyl, PVC**, PVDF

* Only used in the Slurry Mode
** Flame retardant (FMET4325)

Physical Specifications

Mounting Orientation Horizontal or Vertical
Fluid Connections Inlet/Outlet: 1/4" or 3/8", Flare or Pillar
Ingress Rating IP65

For additional specification details, please refer to the product data sheet located in the documentation tab of this web page.

Downloads

Product Sheets

CMFC-5000 Product Sheet